发明名称 |
SOLID BODY SURFACES FROM TWO AND MULTIPLE MATERIAL SYSTEMS WITH COMPOSITE NANOSTRUCTURES FROM METALS, SEMICONDUCTORS OR INSULATORS |
摘要 |
The invention relates to functionalized solid body surfaces with composites from two and multiple material systems from metals, semiconductors and insulators or foreign atoms, which have a defined chemical composition based on the nanometer and micrometer-length scale for novel composite nano and microstructures. |
申请公布号 |
WO2013075712(A1) |
申请公布日期 |
2013.05.30 |
申请号 |
WO2012DE200077 |
申请日期 |
2012.11.22 |
申请人 |
HELMHOLTZ-ZENTRUM DRESDEN - ROSSENDORF E.V. |
发明人 |
BUERGER, DANILO;SCHMIDT, HEIDEMARIE;SKORUPA, ILONA |
分类号 |
H01L21/324;H01L21/268 |
主分类号 |
H01L21/324 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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