发明名称 SOLID BODY SURFACES FROM TWO AND MULTIPLE MATERIAL SYSTEMS WITH COMPOSITE NANOSTRUCTURES FROM METALS, SEMICONDUCTORS OR INSULATORS
摘要 The invention relates to functionalized solid body surfaces with composites from two and multiple material systems from metals, semiconductors and insulators or foreign atoms, which have a defined chemical composition based on the nanometer and micrometer-length scale for novel composite nano and microstructures.
申请公布号 WO2013075712(A1) 申请公布日期 2013.05.30
申请号 WO2012DE200077 申请日期 2012.11.22
申请人 HELMHOLTZ-ZENTRUM DRESDEN - ROSSENDORF E.V. 发明人 BUERGER, DANILO;SCHMIDT, HEIDEMARIE;SKORUPA, ILONA
分类号 H01L21/324;H01L21/268 主分类号 H01L21/324
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