| 摘要 |
<P>PROBLEM TO BE SOLVED: To have a Cu-Ga alloy sputtering target contain sodium without incurring a flaw in it. <P>SOLUTION: A mixture of Cu-Ga alloy powder and powder of a sodium compound consisting of sodium and a chalcogen element is sintered by a hot press, in which way the Cu-Ga alloy is made to contain sodium compound particles therein in the form of islands. <P>COPYRIGHT: (C)2013,JPO&INPIT |
