发明名称 CONTACT TYPE CLEANING DEVICE FOR LARGE AREA SUBSTRATE
摘要 PURPOSE: A contact washing device of a large surface substrate is provided to effectively wash a roller stain of a rear surface on the substrate by using a brush provided on a location of a roller. CONSTITUTION: A transfer device of a large surface substrate includes a plurality of transfer shafts(20), a driving unit(30), a rotary shaft(42), and a brush(43). Both transfer shafts are supported by a first and a second support block(10). The transfer shaft is transferred and supported to a rear surface of a substrate by including a plurality of rollers(21). The rotary shaft is located between the transfer shafts and is rotated according to a driving force of the driving unit. The brush is installed at the rotary shaft and washes the rear surface of the transferred substrate.
申请公布号 KR20130056659(A) 申请公布日期 2013.05.30
申请号 KR20110122381 申请日期 2011.11.22
申请人 K.C.TECH CO., LTD. 发明人 BONG, HA YOUNG
分类号 G02F1/13;H01L21/304 主分类号 G02F1/13
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