PIEZOELECTRIC ACTUATOR AND DRIVNG METHOD OF PIEZOELECTRIC ACTUATOR

摘要

PURPOSE: A piezoelectric actuator and a driving method for moving a movable body are provided to enhancing the degree of freedom of motion by reducing frictional heat. CONSTITUTION: A piezoelectric actuator comprises a first piezoelectric element(1) and a substrate(40). The first piezoelectric element comprises a first piezoelectric layer(10) to be sheared in the x-axis direction according to the applied voltage; a second piezoelectric layer(20) to be sheared in the y-axis direction according to the applied voltage; a third piezoelectric layer(30) to be extended or compressed in the z-axis direction; a first separation layer(11) to bind the bottom surface of the first piezoelectric layer to the top surface of the second piezoelectric layer; and a second separation layer(21) to bind the bottom surface of the second piezoelectric layer to the top surface of the third piezoelectric layer. The substrate includes a plurality of first piezoelectric elements attached thereon, which the bottom surface of the third piezoelectric layer is combined to.