| 摘要 |
PURPOSE: A cassette stage supporting a cassette where wafers are stored, and a light-emitting element test device containing the same are provided to efficiently deliver wafers, on which multiple light-emitting elements are formed, to a test device. CONSTITUTION: A cassette stage includes a support plate(120) supporting a cassette for storing multiple wafers, and a pair of alignment block(140) mounted on one side of a base plate and aligning the wafers, drawn out of the cassette by a wafer transfer robot, at a predetermined position on the robot arm of the wafer transfer robot. The wafers are aligned by the movement of the wafer transfer robot which pushes the wafers up to a predetermined position after the wafers on the robot arm touches alignment blocks. |
