| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a Holweck pump stage having improved vacuum data. <P>SOLUTION: A rotor 2 is rotatably supported by a rolling bearing 4, and includes a hub 8 and a sleeve 10 fixed on the hub. The vacuum pump includes the rotor 2 where the sleeve 10 has a first end 12 and a free second end 14 on the opposite side to the hub, and a stator 20 that has a clearance 30 having a clearance width 100 concentrically with the sleeve and is arranged to cover the sleeve. In order to improve the vacuum data, it is proposed to decrease the clearance width toward the rolling bearing. <P>COPYRIGHT: (C)2013,JPO&INPIT |
