| 摘要 |
In inspection for a magnetic head having a built-in fine-motion actuator, stable servo control is realized without an effect of thermal drift or thermal expansion. A magnetic head inspection apparatus includes a fine-motion stage, a data process circuit, and a servo control circuit. The fine-motion stage performs positioning of a magnetic head in a predetermined position on a magnetic disk. The data process circuit measures the movement characteristic of the fine-motion actuator. The servo control circuit controls the magnetic head to track the servo track on the magnetic disk based on a measurement result of the data process circuit. The servo control circuit drives the fine-motion stage, and controls the magnetic head to move in a manner that the value of movement of the fine-motion actuator remains within an acceptable range.
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