ACTUATOR MANUFACTURING METHOD AND ACTUATOR

摘要

A method for manufacturing an actuator equipped with a movable part (120) on which a reflective film (170) is formed, a support part (110) surrounding the movable part (120), and torsion bars (130) connecting the movable part and the support part such that the movable part is capable of oscillating, said method being equipped with: a first step (S106), wherein the movable part, the support part, and the torsion bars are formed on a substrate (201); a second step (S105), wherein the reflective film is formed on the movable part; and a third step (S103), wherein a protruding part (180), which (i) has sufficient height to protrude from the surface of the reflective film and (ii) prevents other structures from making contact with the reflective film, is formed on the side of the movable part on which the reflective film is formed.