| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum pump which can improve vibration reduction performance while suppressing complication of a structure. <P>SOLUTION: In the vacuum pump, a rotor in which a discharge function unit is formed is supported by a ball bearing 8 and a permanent magnet type magnetic bearing, and the rotor is rotated at high speed by a motor for vacuum evacuation. The vacuum pump has holding mechanisms 42, 44 and 45 which hold an outer ring 81 of the ball bearing 8 from in an axial direction and hold the outer ring 81 to be movable in a radial direction, and an elastic member 46 which is provided at an outer periphery side of the outer ring 81. The elastic member 46 is provided to contact with or be proximate to the outer periphery of the outer ring 81, and when the elastic member 46 is provided proximate to the outer periphery of the outer ring 81, oil or grease is poured into a gap 47 between the elastic member 46 and the outer ring 81. The outer ring 81 abuts on the elastic member 46, which causes deformation, and thereby vibration is suppressed, further, by pouring the oil or grease into the gap 47, it is possible to further improve a vibration reduction effect. <P>COPYRIGHT: (C)2013,JPO&INPIT |
