| 摘要 |
<P>PROBLEM TO BE SOLVED: To make it possible to deform a reflective surface of a reflection member into a various shapes with a small force by using a mechanism easy to install. <P>SOLUTION: A deformable mirror 50, which reflects illumination light IL, comprises: a mirror 22 composed of a concave mirror which reflects illumination light IL; a convex mirror post 24 disposed on a rear face 22e of a reflective surface 22d of the mirror 22; a load supply system 58 which displaces a tip of the mirror post 24 in a direction crossing the direction in which the mirror post 24 extends; and a position sensor 60 which measures a displacement of the tip of the mirror post 24. <P>COPYRIGHT: (C)2013,JPO&INPIT |
