发明名称 METHOD FOR MANUFACTURING A MAGNETIC SENSOR USING TWO STEP ION MILLING
摘要 A method for manufacturing a magnetic sensor that includes depositing a plurality of mask layers, then forming a stripe height defining mask over the sensor layers. A first ion milling is performed just sufficiently to remove portions of the free layer that are not protected by the stripe height defining mask, the first ion milling being terminated at the non-magnetic barrier or spacer layer. A dielectric layer is then deposited, preferably by ion beam deposition. A second ion milling is then performed to remove portions of the pinned layer structure that are not protected by the mask, the free layer being protected during the second ion milling by the dielectric layer.
申请公布号 US2013135772(A1) 申请公布日期 2013.05.30
申请号 US201113306887 申请日期 2011.11.29
申请人 AHN YONGCHUL;DANG XIAOZHONG;LE QUANG;LIAO SIMON H.;HITACHI GLOBAL STORAGE TECHNOLOGIES NETHERLANDS B.V. 发明人 AHN YONGCHUL;DANG XIAOZHONG;LE QUANG;LIAO SIMON H.
分类号 G11B5/127;C23F1/04 主分类号 G11B5/127
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