发明名称 METHOD FOR PRODUCING SYNTHETIC QUARTZ GLASS
摘要 A known method for producing synthetic quartz glass comprises the method steps: providing a liquid SiO2 feedstock material, which contains octamethylcyclotetrasiloxane D4 as the main component, vaporizing the SiO2 feedstock material into a feedstock material vapor, converting the feedstock material vapor into SiO2 particles, depositing the SiO2 particles on a deposition surface while forming a porous SiO2 soot body, and vitrifying the SiO2 soot body while forming the synthetic quartz glass. Starting therefrom, to produce large-volume cylindrical soot bodies with outer diameters of more than 300 mm of improved material homogeneity, it is suggested according to the invention that the liquid feedstock material contains additional components comprising hexamethylcyclotrisiloxane D3 and the linear homolog thereof with a weight fraction mD3, decamethylcyclohexasiloxane D6 and the linear homolog thereof with a weight fraction mD6, and tetradecamethylcycloheptasiloxane D7 and/or hexadecamethylcyclooctasiloxane D8 and the linear homologs thereof with a weight fraction mD7+, wherein the weight ratio mD3/mD6 is in a range between 0.05 and 90 and the weight fraction mD7+ is at least 20 wt. ppm.
申请公布号 US2013133378(A1) 申请公布日期 2013.05.30
申请号 US201213684375 申请日期 2012.11.23
申请人 FABIAN HEINZ;HERAEUS QUARZGLAS GMBH & CO. KG 发明人 FABIAN HEINZ
分类号 C03B37/018 主分类号 C03B37/018
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