发明名称 |
Method of fabricating isolated semiconductor structures |
摘要 |
Embodiments related to semiconductor manufacturing and semiconductor devices with semiconductor structure are described and depicted. |
申请公布号 |
US2013134530(A1) |
申请公布日期 |
2013.05.30 |
申请号 |
US201113304334 |
申请日期 |
2011.11.24 |
申请人 |
KAUTZSCH THORALF;BINDER BORIS;HELM TORSTEN;KOLB STEFAN;PROBST MARC;RUDOLPH UWE |
发明人 |
KAUTZSCH THORALF;BINDER BORIS;HELM TORSTEN;KOLB STEFAN;PROBST MARC;RUDOLPH UWE |
分类号 |
H01L29/84;H01L21/02;H01L21/31;H01L29/66 |
主分类号 |
H01L29/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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