MICROFLUIDIC SEMICONDUCTOR SENSOR

摘要

Disclosed is a microfluidic semiconductor sensor. The microfluidic semiconductor sensor includes: a semiconductor sensor disposed on the front surface of a semiconductor substrate; a concave groove defined in the back surface of the semiconductor substrate; and a microfluidic channel defined in the back surface of the semiconductor substrate. The semiconductor substrate having the concave groove has a thickness equal to less than that of the semiconductor substrate having the microfluidic channel.