RECYCLING SYSTEM OF PHOTOACRYLIC DEVELOPER IN LCD MANUFACTURING PROCESS

摘要

PURPOSE: A recycling system of a photo acrylic developer is provided to conduct a developer recycling process without stopping the whole system processes by automatically converting a blocked filter array into a filter array. CONSTITUTION: A recycling system of a photo acrylic developer comprises: a first filter array(FA1) which filters photo acryl in a waste developer; a first filter array inflow pressure transmitter(PT1) measuring and transferring the inflow pressure of the waste developer; a first filter array outflow pressure transmitter(PT2) measuring and transferring the outflow pressure of the waste developer; a second filter array(FA2) which filters the photo acryl in the waste developer; a second filter array inflow pressure transmitter measuring and transferring the inflow pressure of the waste developer; and a second filter array outflow pressure transmitter measuring and transferring the outflow pressure of the waste developer.