SHAPE ADJUSTING STAGE FOR RESIN STAMPER, AND IMPRINT DEVICE WITH THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a shape adjusting stage for a resin stamper that can adjust the shape of a resin stamper having a deformed shape caused by expansion and contraction due to heat or changes in ambient environment.

SOLUTION: The shape adjusting stage 10 for a resin stamper includes a placement table 12 on which the resin stamper 16 with a fine uneven pattern formed on one surface thereof is placed such that the another side surface of the surface on which the uneven patter is formed makes contact with the placement table. The placement table 12 is divided in a plurality of parts. At least some of the plurality of divided placement parts 12-1 to 12-9 have: a fixture mechanism for fixing the resin stamper from the surface on the another side of the resin stamper; and a movement mechanism movable in a horizontal direction of the placement surface of the placement table.

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