发明名称 SEMICONDUCTOR DEVICE
摘要 A semiconductor device includes a conductive film formed on an insulating film, and a first polysilicon film formed on the conductive film. A stacked film including the conductive film and the first polysilicon film forms a first pattern including a central region, and end regions each located at a side of the central region. A silicide film is formed on at least the central region of the stacked film. A discontinuity is formed in a central region of the conductive film. The conductive film is separated into the two portions by the discontinuity.
申请公布号 US2013134519(A1) 申请公布日期 2013.05.30
申请号 US201313751217 申请日期 2013.01.28
申请人 PANASONIC CORPORATION;PANASONIC CORPORATION 发明人 SENGOKU NAOHISA
分类号 H01L29/78 主分类号 H01L29/78
代理机构 代理人
主权项
地址