| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a diffracted X-ray detection method and an X-ray diffraction device capable of making the intensity irregularity due to a honeycomb lattice of a raster element uniform. <P>SOLUTION: There is provided a diffracted X-ray detection method which is performed through a raster element 10 formed by poly-capillaries. The X-rays passing through the raster element 10 are detected by a detector 20 while making X-rays diffracted by a sample incident on the raster element 10 and changing the position of the raster element 10 for a diffraction angle of the X-ray by maintaining the distance from the center S<SB POS="POST">0</SB>of the sample. Thus, the influence by a honeycomb lattice occurred every diffraction angle is dispersed and the intensity irregularity due to a honeycomb lattice can be made uniform. Consequently, a measurement can be effectively carried out in which a scattered line from the periphery of the sample is eliminated by applying a raster element and the resolution is improved by a so-called minute incident angle X-ray diffraction measurement. <P>COPYRIGHT: (C)2013,JPO&INPIT |
