| 摘要 |
<p>The invention relates to an interferometric system meant to measure some layer masses and/or thicknesses of very low values. According to the invention, the interferometric system comprises a radiation source (1) of laser diode type, an optical fiber (2) which is divided by means of an optical divider (3) into an optical fiber (4) for transmitting a reference light beam and an optical fiber (5) for transmitting a working beam, an optical prism (6) with a structure specific to surface plasmonic resonance, a focus lens (11), an optical fiber (12) for the light beam transmission, an optical accumulator (13), another optical fiber (14), a Michelson interferometer comprising, in its turn, a semi-transparent mirror (15), a mobile mirror (16) with total reflection moved by a linear piezoelectric motor (17), a fixed mirror (18) with total reflection and a photoelectric detector (19), a central electronic unit (21) and a computation unit (22) provided with a computation program for data acquisition and processing.</p> |
