发明名称 |
APPARATUS AND METHODS FOR IMPROVING RELIABILITY OF RF GROUNDING |
摘要 |
<p>Embodiments of the present invention provide an RF conducting rod comprising a hollow portion. Particularly, the RF conducting rod comprises an elongated hollow body having a sidewall enclosing an inner volume, a first solid connector extending from a first end of the elongated hollow body, and a second solid connector extending from a second end of the elongated hollow body. Each of the elongated hollow body, the first solid connector and the second solid connector is formed from an electrically conductive material.</p> |
申请公布号 |
WO2013077994(A1) |
申请公布日期 |
2013.05.30 |
申请号 |
WO2012US63591 |
申请日期 |
2012.11.05 |
申请人 |
APPLIED MATERIALS, INC.;ZHOU, JIANHUA |
发明人 |
ZHOU, JIANHUA |
分类号 |
H05H1/46;C23C16/50;H01L21/205 |
主分类号 |
H05H1/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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