| 摘要 |
PURPOSE: A spray apparatus is provided to use a substrate delivery device which is general type and delivers a substrate in a horizontal direction, and to simultaneously plan to have the inclined angle of a spraying material which is sprayed to the substrate. CONSTITUTION: A spray apparatus(200) comprises a chamber(100), a delivery unit(400), and a plurality of spraying units. The chamber receives and washes a substrate. The delivery unit delivers the substrate in a horizontal direction in the chamber. The plurality of spraying units are located on an upper part of chamber. The plurality of spraying units spray fluid to the substrate to have an inclined angle from a horizontal direction. The plurality of spray units have an inclined angle of 10 to 15 degree from a line vertical to the horizontal direction of substrate.
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