| 摘要 |
<p>The device (10) has a mirror assembly (200) comprising mirror elements independently adjustable for variation of deflection angle of hitting light. Two reflecting side surfaces (101, 104) are arranged in such a manner that a light beam, reflected at the mirror elements, is guidable on a location in a pupil plane of the device by variation of the deflection angle on over different beam paths. A polarization influencing optical element is attached to each reflecting side surface so that a state of polarization of the light beam on the beam paths is differently influenced. An independent claim is also included for a method for microlithographic manufacturing of microstructured components.</p> |
