PLASMA GENERATING ELECTRODE AND PLASMA REACTOR

摘要

In a plasma generating electrode 1, at least one of opposing unit electrodes 2 includes a sheet-shaped ceramic dielectric 3 and a conductive film 4 disposed in the ceramic dielectric 3 and partially extending on the surface of the ceramic dielectric 3 opposite to the other unit electrode 2 on the end of the ceramic dielectric 3, and a conductive terminal 5 is electrically connected with the conductive film 4 extending on the surface of the ceramic dielectric 3 opposite to the other unit electrode 2 on the end of the ceramic dielectric 3. Therefore, simple and reliable electrical connection can be achieved.