| 摘要 |
A method and apparatus for generating a control signal(12)for controlling an actuator(7), wherein the control signal (12) is generated, by a pulse generator (6) by superimposing a pulsed signal (3) and a reference signal(1), and wherein the control signal (12) comprises a pulsed control signal (4) that is representative of the pulsed signal (3) and the reference signal(1). The method and apparatus can usefully be used to control actuators in deposition systems whereby the pulse generator mixes a plurality of pulsed and/or non-pulsed signals to form a single pulsed output signal (12) that can be used to directly control the actuator (7) which may be controlled in response to a number of sensed process parameters, user inputs or computer-generated inputs. |
