| 摘要 |
<p>A pulsed valve cracker effusion cell comprising an evaporation chamber (11), a delivery system (13) and a conduit (20) in fluid communication with the evaporation chamber (11) and the delivery system (13), a high temperature heating element located in the conduit and a flow controller (17) for controlling the flux of a gas into the delivery system (13), characterised by the flow controller (17) comprising an on/off valve and a controller for controlling the on/off state of the valve. This invention relates to a pulsed valve cracker effusion cell for the injection of vapours generated by solid or liquid sublimation into a process system, mainly a vacuum system. The present invention also relates to the regulation of the vapour flow by means of an intermittent valve (17). The invention has been designed for linear and uniform injection of gases from solid or liquid sources, e.g. sulphur, tellurium, selenium etc. as an elemental atomized vapour.</p> |
