Device for separating regions and/or optical elements in projection exposure system, has feed line and return line for conducting fluid, which are arranged to fluid in separating area for forming fluid curtain

摘要

The device has a feed line (303) and return line (304) for conducting fluid, which are arranged to the fluid in the separating area for forming the fluid curtain (310). The separation region has a separating surface or dividing plane, along which the fluid for formation of the fluid curtain flows. The feed line comprises a discharge opening (305) and the return line suction comprises a receiving opening (306), so that the fluid curtain is formed between the discharge opening and the receiving opening. Independent claims are included for the following: (1) projection exposure system; and (2) method for separation of optical elements in projection exposure.