发明名称 |
A LATERAL TRANSFER SYSTEM |
摘要 |
A modular lateral transfer system for use in a horizontally oriented processing chamber is provided. Each module has the ability to deliver process gas in addition to moving the reactant material through the horizontally oriented processing chamber. The modular design enables the operator to remove and replace a module of the system, thereby substantially minimizing the downtime of the chamber required during servicing. |
申请公布号 |
ZA201206012(B) |
申请公布日期 |
2013.05.29 |
申请号 |
ZA20120006012 |
申请日期 |
2012.08.10 |
申请人 |
PLASCOENERGY IP HOLDINGS S.L.. BILBAO, SCHAFFHAUSEN BRANCH |
发明人 |
BACON MARC;TSANGARIS ANDREAS;FEASBY DOUGLAS MICHAEL;GRAVELLE ROBERT A |
分类号 |
B01J;F27D |
主分类号 |
B01J |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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