发明名称 PECVD COATING USING AN ORGANOSILICON PRECURSOR
摘要 A vessel processing system for coating of a vessel is provided, the system comprising: a first processing station configured for performing a first processing of an interior surface of the vessel, a second processing station spaced from the first processing station and configured for performing a second processing of the interior surface of the vessel, a vessel holder comprising a vessel port configured to receive and seat an opening of the vessel for processing the interior surface of the seated vessel via the vessel port at the first processing station and at the second processing station, and a conveyor arrangement for transporting the vessel holder and the seated vessel after the first processing from the first processing station to the second processing station for the second processing of the interior surface of the seated vessel at the second processing station.
申请公布号 ZA201107835(B) 申请公布日期 2013.05.29
申请号 ZA20110007835 申请日期 2011.10.26
申请人 SI02 MEDICAL PRODUCTS , INC 发明人 FELTS JOHN T;FISK THOMAS E;ABRAMS ROBERT S;PANGBORN ROBERT J;SAGONA PETER J
分类号 C23C;H01L 主分类号 C23C
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