Micro-mirror arrangement for wafer arrangement for e.g. laser projection, has static deflecting mirror for optical coupling of micro-mirrors, where deflecting mirror is bent regarding plane given by surface of substrate wafer

摘要

The arrangement has micro-mirrors (4, 5) lying next to one another and carved out from a common substrate wafer (1) on a wafer plane. A base wafer (2) is connected with the substrate wafer, and a partial transparent lid (3) is connected with the substrate wafer. A static deflecting mirror (10) is arranged over the micro-mirrors for optical coupling of the micro-mirrors. The static deflecting mirror is bent regarding the plane given by a surface of the substrate wafer. The lid consists of glass or glass and silicon. The base wafer and substrate wafer consist of silicon or glass and silicon. An independent claim is also included for a wafer arrangement.