| 摘要 |
PURPOSE: A door of a gate valve for a vacuum process is provided to prevent the generation of particles by combining a shield ring with a shield channel recessed in an opening/closing surface by a forced insertion method. CONSTITUTION: A metal body(110) has an opening/closing surface, one of the main surfaces of a rectangular parallelepiped. An elastic sealing ring(120) has a closed loop corresponding to the edge region of the opening/closing surface. The sealing ring is bonded to the edge region of the opening/closing surface and has a first height. A shield ring(130) is connected to the opening/closing surface and separated from the sealing ring. The shield ring is combined with a shield channel(116) recessed in the opening/closing surface using a forced insertion method.
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