发明名称 Sealed thin-film device as well as method of repairing, system for repairing and computer program product
摘要 The invention relates to a sealed thin-film device (10, 12, 14, 15, 16, 17, 18), to a method of repairing a sealing layer (20) applied to a thin-film device (30) to produce the sealed thin-film device, to a system (200) for repairing the sealing layer applied to the thin-film device to generate the sealed thin-film device and to a computer program product. The sealed thin-film device comprises a thin-film device and a sealing layer applied on the thin-film device for protecting the thin-film device from environmental influence. The sealing layer comprising at least a first and a second barrier layer (22, 24) and a getter layer (25) arranged between the first and the second barrier layer. The sealed thin-film device further comprises locally applied mending material (40; 42, 44) for sealing a local breach (50) in an outer one (22) of said barrier layers. An effect of this sealed thin-film device is that the operational life-time of the sealed thin-film device is improved. Furthermore, the production yield of the production of sealed thin-film devices is improved.
申请公布号 EP2597697(A1) 申请公布日期 2013.05.29
申请号 EP20110190975 申请日期 2011.11.28
申请人 NEDERLANDSE ORGANISATIE VOOR TOEGEPAST -NATUURWETENSCHAPPELIJK ONDERZOEK TNO;KONINKLIJKE PHILIPS ELECTRONICS N.V. 发明人 VERSCHUREN, COEN;VAN MOL, ANTONIUS MARIA BERNARDUS;VAN DE WEIJER, PETER
分类号 H01L51/52 主分类号 H01L51/52
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