Method and device for optically scanning an object and device

摘要

A method and device for optically scanning an object is provided. A detection device optically scans a scanning region of the object by displacing the detection device and the object relative to one another into successive scanning positions spaced apart by a scanning step size along a scanning direction in an object plane. An optical imaging device generates a plurality of scanned images by imaging a partial scanning region from the object plane onto a detection surface in an image plane in the scanning positions. The plurality of scanned images are broken down into scanned part images and are combined to generate combined result images. At least one object measurement image is selected from the combined result images in accordance with one or more predetermined selection criteria.