APPARATUS FOR SUPPORTING A WAFER

摘要

PURPOSE: An apparatus for supporting a wafer is provided to use a direct drive motor as a driver for rotating the wafer and to secure a simple structure. CONSTITUTION: A direct drive motor(102) includes a rotor and a stator. An upper base plate(110) is mounted on the upper surface of the rotor. The upper base plate has an upper though hole. A porous chuck(118) is arranged on the upper base plate. The porous chuck is made of a porous material.