发明名称 Semiconductor device and method of forming the same
摘要 In a semiconductor device, an organic insulation pattern is disposed between first and second rerouting patterns. The organic insulation pattern may absorb the physical stress that occurs when the first and second rerouting patterns expand under heat. Since the organic insulation pattern is disposed between the first and second rerouting patterns, insulating properties can be increased relative to a semiconductor device in which a semiconductor pattern is disposed between rerouting patterns. Also, since a seed layer pattern is disposed between the first and second rerouting patterns and the organic insulation pattern and between the substrate and the organic insulation pattern, the adhesive strength of the first and second rerouting patterns is enhanced. This also reduces any issues with delamination. Also, the seed layer pattern prevents the metal that forms the rerouting pattern from being diffused to the organic insulation pattern. Therefore, a semiconductor device with enhanced reliability may be implemented.
申请公布号 US8450856(B2) 申请公布日期 2013.05.28
申请号 US201113240533 申请日期 2011.09.22
申请人 KANG UN-BYOUNG;CHOI KWANG-CHUL;KIM JUNG-HWAN;MIN TAE HONG;LEE HOJIN;YOON MINSEUNG;SAMSUNG ELECTRONICS CO., LTD. 发明人 KANG UN-BYOUNG;CHOI KWANG-CHUL;KIM JUNG-HWAN;MIN TAE HONG;LEE HOJIN;YOON MINSEUNG
分类号 H01L23/48 主分类号 H01L23/48
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