| 摘要 |
In a case where a position command path for a control position of a load 5 that is equivalent to a moving object is set by issuing a position command Rc(z), a gain for one of a high-frequency component, a specified frequency, and a specified frequency width is constrained. This means that a resonant frequency can be constrained, and that after the position command Rc(z) arrives at a target position, a position detection signal Y(z) can also arrive at the target position in a set number of steps. It is therefore possible to perform positioning at high speed and with high precision by constraining a resonance mode of a mechanism that includes the moving object, and a feed-forward control can be performed that meets target positioning times that are set for various types of operating patterns.
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