SUBSTRATE TREATING APPARATUS

摘要

PURPOSE: A substrate processing apparatus is provided to prevent a safety accident by using a cooling member for cooling a tray which is formed in a holding unit. CONSTITUTION: A load-lock unit(20) is adjacent to a loading/unloading unit. A process unit(30) is adjacent to the load-lock unit. A holding unit(40) is detached and attached from/to the process unit. A transfer member moves a substrate between the process unit and the load-lock unit. The transfer member is formed in the process unit and the load-lock unit.