发明名称 Solid-state imaging sensor, method of manufacturing the same, and image pickup apparatus
摘要 Disclosed is a solid-state image sensor including a photoelectric converter, a charge detector, and a transfer transistor. The photoelectric converter stores a signal charge that is subjected to photoelectric conversion. The charge detector detects the signal charge. The transfer transistor transfers the signal charge from the photoelectric converter to the charge detector. In the solid-state image sensor, the transfer transistor includes a gate insulating film, a gate electrode formed on the gate insulating film, a first spacer formed on a sidewall of the gate electrode on a side of the photoelectric converter, and a second spacer formed on another sidewall of the gate electrode on a side of the charge detector. The first spacer is longer than the second spacer.
申请公布号 US8450780(B2) 申请公布日期 2013.05.28
申请号 US20100657047 申请日期 2010.01.13
申请人 OISHI TETSUYA;SONY CORPORATION 发明人 OISHI TETSUYA
分类号 H01L21/28;H01L27/148 主分类号 H01L21/28
代理机构 代理人
主权项
地址