发明名称 Semiconductor device and production method thereof
摘要 An object of the present invention is to provide a semiconductor device having a nonvolatile memory cell of a high operation speed and a high rewrite cycle and a nonvolatile memory cell of high reliability. In a split gate type nonvolatile memory in which memory gate electrodes are formed in the shape of sidewalls of control gate electrodes, it is possible to produce a memory chip having a memory of a high operation speed and a high rewrite cycle and a memory of high reliability at a low cost by jointly loading memory cells having different memory gate lengths in an identical chip.
申请公布号 US8450790(B2) 申请公布日期 2013.05.28
申请号 US20100787151 申请日期 2010.05.25
申请人 KAWASHIMA YOSHIYUKI;RENESAS ELECTRONICS CORPORATION 发明人 KAWASHIMA YOSHIYUKI
分类号 H01L29/788 主分类号 H01L29/788
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