| 摘要 |
The liquid material discharge device and method discharges a liquid droplet even under a condition where discharge of a small amount of liquid material is required. The apparatus has a liquid chamber having the discharge opening through which the liquid material is discharged, an extrusion member having a plunger and a contact portion, the plunger being thinner than the liquid chamber not to contact a side wall of the liquid chamber and having a forward end portion which advances and retracts within the liquid chamber, and a collision member disposed adjacent to the extrusion member on the side opposite to the plunger and having a piston and a collision portion facing the contact portion. The collision portion collides against the contact portion such that the extrusion member is advanced at a high speed to discharge the liquid material.
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