SUBSTRATE TREATING APPARATUS

摘要

PURPOSE: A substrate processing apparatus is provided to separate a loading unit from an unloading part of a substrate and to optimize an in-line structure. CONSTITUTION: A load-lock unit(200) is adjacent to a loading unit(100). A process unit(300) is adjacent to the load-lock unit. An unload lock unit(400) is adjacent to the process unit. An unloading unit(500) is adjacent to the unload lock unit. A transfer member moves a substrate between the loading unit, the load-lock unit, the process unit, the unload lock unit, and the unloading unit.