发明名称 |
Tunable Piezoelectric MEMS Resonators suitable for real-time clock applications |
摘要 |
A microelectromechanical resonator can include a suspended frame-shaped beam anchored at four corners thereof to a surrounding substrate along with a suspended resonator plate tethered on four sides thereof to corresponding sides of the frame-shaped beam. A pair of drive electrodes are provided on first and third diametrically opposite corners of the frame-shaped beam and a pair of sense electrodes are provided on second and fourth diametrically opposite corners of the frame-shaped beam. The resonator may also include a ground electrode on the frame-shaped beam and a piezoelectric layer sandwiched between each of the drive and sense electrodes and the ground electrode.
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申请公布号 |
US8450913(B1) |
申请公布日期 |
2013.05.28 |
申请号 |
US201113077545 |
申请日期 |
2011.03.31 |
申请人 |
AYAZI FARROKH;SERRANO DIEGO EMILIO;GEORGIA TECH RESEARCH CORPORATION |
发明人 |
AYAZI FARROKH;SERRANO DIEGO EMILIO |
分类号 |
H01L41/047;H01L41/053;H01L41/08 |
主分类号 |
H01L41/047 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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