INERTIAL SENSOR

摘要

PURPOSE: An inertia sensor is provided to maintain the gap between a driving mass of a sensor part and a stopper of a bottom cap constantly and accurately, by combining the sensor part and the bottom cap using a DFR(Dry Film Resist) after forming the stopper in the bottom cap. CONSTITUTION: An inertia sensor(100) includes a sensor part(110), a bottom cap(120) and a DFR(Dry Film Resist)(130). The sensor part includes a driving mass(111),a flexible substrate part(112) and a supporting part(113). The flexible substrate part supports the driving mass to enable displacement of the driving mass. The supporting part supports the flexible substrate part to enable free movement as the driving mass is floated. The bottom cap covers the bottom of the driving mass and is combined to the supporting part, and has a stopper restricting the displacement of the driving mass. The DFR combines the sensor part and the cover, and provides the gap between the driving mass and the stopper.