SUBSTRATE TREATING APPARATUS

摘要

PURPOSE: A substrate processing apparatus is provided to reduce the time for transferring a substrate transfer tray by arranging two substrate transfer trays at the same time in a process unit. CONSTITUTION: A load-lock unit(20) is arranged between a loading/unloading unit(10) and a process unit(30). A transfer member moves a substrate between the process unit and the load-lock unit. The transfer member is supplied into the process unit and the load-lock unit. A control unit controls the transfer member. The loading/unloading unit, the load-lock unit, and the process unit are successively arranged.