| 摘要 |
PURPOSE: A high-frequency antenna circuit and an inductively coupled plasma processing device are provided to improve power efficiency by suppressing heat generation of a matching circuit. CONSTITUTION: A high-frequency antenna circuit includes a plasma generation antenna(16), a high-frequency power supply(18), and a matching circuit(19). The plasma generation antenna is composed of multiple sectionalized antennas(16-1,...,16-5) and generates plasma in a processing chamber. The high-frequency power supply supplies high-frequency power to the plasma generation antenna. The matching circuit is inserted between the high-frequency power supply and the plasma generation antenna. The multiple sectionalized antennas form the plasma generation antenna, and high-frequency power is distributed to the multiple sectionalized antennas after passing through the matching circuit. Parallel resonance capacitor circuits(30-1,...,30-5) are installed at each of the multiple sectionalized antennas in parallel. |
