METHOD OF PREPARING SUBSTRATE

摘要

PURPOSE: A method for manufacturing a substrate is provided to improve productivity by extending the use time of a polishing pad. CONSTITUTION: A polishing pad has a nap layer. The nap layer is contacted with the substrate. The nap layer has air gaps. The nap layer is made of base resin. The base resin includes ether resin, ester resin, and polycarbonate resin.