| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pellicle storage container that can improve visual examination of a cover in a better yield. <P>SOLUTION: A pellicle storage container 1 includes a pellicle placement table 5 on which a pellicle 3 is placed, and a cover 7 which covers the pellicle placement table 5 from above, the cover 7 having a part whose light transmittance is 60% or lower. <P>COPYRIGHT: (C)2013,JPO&INPIT |
