发明名称 |
Carbon Nanotube-Graphene Hybrid Transparent Conductor and Field Effect Transistor |
摘要 |
A nanotube-graphene hybrid film and method for forming a cleaned nanotube-graphene hybrid film. The method includes depositing nanotube film over a substrate to produce a layer of nanotube film, removing impurities from a surface of the layer of nanotube film not contacting the substrate to produce a cleaned layer of nanotube film, depositing a layer of graphene over the cleaned layer of nanotube film to produce a nanotube-graphene hybrid film, and removing impurities from a surface of the nanotube-graphene hybrid film to produce a cleaned nanotube-graphene hybrid film, wherein the hybrid film has improved electrical performance. Another method includes depositing nanotube film over a metal foil to produce a layer of nanotube film, placing the metal foil with as-deposited nanotube film in a chemical vapor deposition furnace to grow graphene on the nanotube film to form a nanotube-graphene hybrid film, and transferring the nanotube-graphene hybrid film over a substrate. |
申请公布号 |
US2013130037(A1) |
申请公布日期 |
2013.05.23 |
申请号 |
US201113301943 |
申请日期 |
2011.11.22 |
申请人 |
BOL AGEETH A.;CHANDRA BHUPESH;KASRY AMAL;MAAROUF AHMED;MARTYNA GLENN J.;TULEVSKI GEORGE S.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BOL AGEETH A.;CHANDRA BHUPESH;KASRY AMAL;MAAROUF AHMED;MARTYNA GLENN J.;TULEVSKI GEORGE S. |
分类号 |
B32B9/04;B05D1/02;B05D3/02;B05D5/12;B82Y30/00;B82Y40/00;C23C16/26;C23F1/02 |
主分类号 |
B32B9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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