| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve a fill factor of a micromirror apparatus and a micromirror array. <P>SOLUTION: Electrodes 15-1 to 15-4 are arranged facing to movable beams 12-1 to 12-4. Thereby, respective mirrors 14 can be arranged in high density rather than a case where fixed electrodes are arranged facing to a mirror, and as a result, a fill factor is improved. <P>COPYRIGHT: (C)2013,JPO&INPIT |
