| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical scanner that has a stable scanning angle over a wider temperature range by devising the shape of a cantilever beam part supporting a twist beam part and the fitting position of the twist beam part. <P>SOLUTION: The optical scanner that includes a substrate, the twist beam part connected to the substrate, a mirror part supported by the twist beam part, a driving source for driving the substrate, and a light source for projecting light on the mirror part is characterized in that the mirror part makes resonant vibrations corresponding to vibrations applied by the driving source to the substrate, the direction of reflected light of the light projected on the mirror part from the light source changes with the vibrations of the mirror part, and the width of the cantilever beam part supporting the twist beam part is 1/6 or less time as large as the width of the substrate. <P>COPYRIGHT: (C)2013,JPO&INPIT |
