| 摘要 |
A semiconductor X-ray detector comprises: a semiconductor X-ray sensor portion 10, which has a plate-like outer shape including an opening portion 11 near to a central portion thereof, and is formed with plural numbers of pixel-like X-ray sensors between a surface and a reverse surface thereof; and a read-out portion 20, which is disposed on the reverse surface of the semiconductor X-ray sensor portion, and executes a predetermined process on each of signals outputted from the plural numbers of the X-ray sensors building up the semiconductor X-ray sensor portion, thereby outputting detected signals therefrom. The read-out portion is built up by assembling read-out units in plural numbers thereof, flatly in one body, each being formed into a rectangular shape, respectively, and forming plural numbers of pads on a surface thereof, as well as, having plural numbers of processing circuit portions and plural numbers of through hole vias in an inside thereof, and further having plural numbers of pads on a reverse surface thereof. The semiconductor X-ray sensor portion and the read-out portion are laminated to form into one body.
|
